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Silicon Wafer Inspection Systems
Superior Surface Contaminant Detection
Particulate Detection to 1μm
Producing defect free silicon wafers requires high-resolution, 100% particle detection at each critical process stage from IQC onward. Conventional inspection systems perform this task at high-resolution but are not suitable for in-line use. Dark Field has developed new high-speed laser inspection technology which can be easily integrated with the wafer tools and deliver 100% wafer inspection within 2 seconds in a compact design which is completely self-aligning.
Silicon Wafer Solutions
Your Partner For Complete Inspection & Metrology Solutions, From Product Development Through Production
Contract Inspection
Contract Inspection allows your team to deploy Dark Field’s inspection expertise even in the early days of product and process development.
R&D Tabletop Systems
Turnkey tabletop inspection systems allow pilot lines, Labs and R&D operations to start using SSLR technology early in the product/process development. Systems are modular and may be repurposed to the production line in the future. This means that the Lab or Pilot Line results are directly transferrable to Production.
Solid State Laser Reflection (SSLR) Systems for Pilot Lines and Production
The world’s most advanced technology solution for finding defects and taking measurements in RTR, Sheet and Wafer Production. On-line defect detection to 1µm. Achieve greater throughput, improved quality, minimize scrap, eliminate manual labor, and improve costs – concurrently.
Turnkey Systems
New processes and pilot plants sometimes require a stand-alone, special turnkey system. Dark Field turnkey systems deliver recipe-based defect detection and metrology for all process operations. Systems include XYZ stages and requisite safety interlocks and controls. This system may later be repurposed for Production.
Future Upgrades
As processes and products change or evolve, Dark Field systems may be upgraded for wider and faster operations, greater system resolution and customized software. Dark Field systems are completely modular so they can be upgraded in the field.