Silicon Wafer Inspection Systems

Superior Surface Contaminate Detection

Particulate Detection to 1μm

Producing defect free silicon wafers requires high-resolution, 100% particle detection at each critical process stage from IQC onward.  Conventional inspection systems perform this task at high-resolution but are not suitable for in-line use. Dark Field has developed new high-speed laser inspection technology which can be easily integrated with the wafer tools and deliver 100% wafer inspection within 2 seconds in a compact design which is completely self-aligning.

Silicon Wafer Solutions

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